In vivo measurements with robust silicon-based multielectrode arrays with extreme shaft lengths

In this paper, manufacturing and in vivo testing of extreme-long Si-based neural microelectrode arrays are presented. Probes with different shaft lengths (15–70 mm) are formed by deep reactive ion etching and have been equipped with platinum electrodes of various configurations. In vivo measurements on rats indicate good mechanical stability, robust implantation, and targeting capability. High-quality signals have been recorded from different locations of the cerebrum of the rodents. The accompanied tissue damage is characterized by histology

A Multimodal, SU-8-Platinum - Polyimide Microelectrode Array for Chronic In Vivo Neurophysiology

Utilization of polymers as insulator and bulk materials of microelectrode arrays (MEAs) makes the realization of flexible, biocompatible sensors possible, which are suitable for various neurophysiological experiments such as in vivo detection of local field potential changes on the surface of the neocortex or unit activities within the brain tissue. In this paper the microfabrication of a novel, all-flexible, polymer-based MEA is presented. The device consists of a three dimensional sensor configuration with an implantable depth electrode array and brain surface electrodes, allowing the recording of electrocorticographic (ECoG) signals with laminar ones, simultaneously. In vivo recordings were performed in anesthetized rat brain to test the functionality of the device under both acute and chronic conditions. The ECoG electrodes recorded slow-wave thalamocortical oscillations, while the implanted component provided high quality depth recordings. The implants remained viable for detecting action potentials of individual neurons for at least 15 weeks

Neural Cell Response to Nanostructured Biosensor Surfaces

AbstractIn our work we investigate the interaction of cells and nanotextured surfaces as a model of implanted device surface and living tissue interaction. We developed a maskless nanostructuring method, which can be integrated into our neural biosensor fabrication process. Morphology of the fabricated nanograss was characterised using SEM. The nanorods are 520-800nm in height and their density is 18-70/μm2. Electrochemical impedance spectroscopy and contact angles of different surfaces were measured. The specific surface area is 30 times larger than the reference. The contact-angle can be tuned. The samples will be tested in viability and adhesion assays using neural cell cultures

The chemical resistance of nano-sized SiC rich composite coating

Abstract 30 keV Ga+ implantation was applied to a nominally C(20 nm)/Si(20 nm)/C(20 nm)/Si(20 nm)/C(20 nm)/Si substrate multilayer system. Due to the irradiation intermixing occurred and a layer containing C, Si, Ga and (amorphous) SiC was obtained. The thickness (7–30 nm) and composition of the layer depended on the fluence of irradiation. The chemical resistance of the layer was tested by applying microwave oxidation and various polysilicon etchants and was found to be excellent if the SiC concentration was above 20%. Using an etchant with an etching rate of about 100 nm/s for poly-Si during 10 s had not affected the integrity of the intermixed region with a thickness of 10 nm; only some defects appeared. With a further increase of the etching time the size of defects increased resulting in inhomogeneous layer removal. The in-depth composition of non-defective region that remained on the surface was determined by AES depth profiling, which revealed that the intermixed layer did not change during the harsh etching except the removal of its thin surface layer containing less than 20% SiC. The etching rate of the intermixed layer is orders of magnitude lower than that for poly-Si